#11403
pulser
Participant

I just ordered Kapton film from ColePalmer last week to stand off a silicon wafer from a chuck (My arena is 30A, 1KV, 5ns pulses with 200ps rise times – different than DPF – but all fun to work with).

If one wants to use Kapton but is concerned about surface damage, then coat with a layer of SiO2, Al2O3, AlN, or Si3N3 by sputter or PECVD deposition.
Multiple layers of insulators interspersed with conductive layes can withstand higher fields).

Saphire can be purchased in wafer form, not sure what diameter is needed here. Much stronger than quartz or glass.
Gorilla glass (Corning) has substantial strength and resistance to damage. If a sheet can be used, this could be useful.

If you can forward me mechanical diagrams, pictures,engineering objectives/constraints, etc., I could make better recommendations.