Generally, vacuum systems are not designed to be pressurized. Also, vacuum is to create a clean environment. Adding a fluid means you are adding something to the system. You can take it out and wipe all the surfaces down but you still need to pump out any residue. Also, the leak rate is likely so small that it would be hard to see with a liquid. How would you localize it without taking the system back apart.
Helium leak detection by puffing helium outside the chamber under vacuum allows you to localize the leak without contaminating the chamber. It’s a tried and true technique used across the vacuum community.