Mask off parts you don’t want coated. Polyamide tape should be good.
Etch with peroxide. This assumes a good solvent clean before taping.
Sputter etch or ion mill the tungsten oxide off and deposit your favorite metal, iridium, platinum, palladium, copper using sputtering insitu. Tungsten forms an oxide readily with exposure to air.
Remove the masking tape. Now your part has a low resistance contact.
Tungsten sucks for low ohmic contacts. We use tungsten probes to aluminium and with scrubbing typically a few ohms.
